Assignee
GRILL ALFRED
US·4 granted patents·7 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0178US8101150B2Control of carbon nanotube diameter using CVD or PECVD growthGRILL ALFRED·Filed 2009·Granted Jan 24, 2012·3 cites·19 claims
- 0271US8637412B2Process to form an adhesion layer and multiphase ultra-low k dielectric material using PECVDGRILL ALFRED·Filed 2011·Granted Jan 28, 2014·2 cites·15 claims
- 0364US8212337B2Advanced low k cap film formation process for nano electronic devicesGRILL ALFRED·Filed 2008·Granted Jul 3, 2012·2 cites·19 claims
- 0451US8664109B2Advanced low k cap film formation process for nano electronic devicesGRILL ALFRED·Filed 2012·Granted Mar 4, 2014·0 cites·14 claims
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