Assignee
GEN PHOSPHORIX LLC
US·21 granted patents·189 citations·filing 1998–2005
Top patents by PatentIndex Score
21 records- 0172US6978215B2Method of determining of true nonlinearity of scan along a selected direction X or Y in scan microscopeGEN PHOSPHORIX LLC·Filed 2001·Granted Dec 20, 2005·11 cites·11 claims
- 0271US6909791B2Method of measuring a line edge roughness of micro objects in scanning microscopesGEN PHOSPHORIX LLC·Filed 2002·Granted Jun 21, 2005·19 cites·10 claims
- 0368US6661007B1Method of diagnosing magnification, linearity and stability of scanning electron microscopeGEN PHOSPHORIX LLC·Filed 2000·Granted Dec 9, 2003·8 cites·6 claims
- 0466US6664894B2Perimeter system for detecting intrudersGEN PHOSPHORIX LLC·Filed 2001·Granted Dec 16, 2003·25 cites·9 claims
- 0564US7209596B2Method of precision calibration of a microscope and the likeGEN PHOSPHORIX LLC·Filed 2004·Granted Apr 24, 2007·9 cites·1 claims
- 0664US7057974B2Device for sensing seismic and acoustic vibrationsGEN PHOSPHORIX LLC·Filed 2003·Granted Jun 6, 2006·9 cites·9 claims
- 0764US6182585B1Method and equipment for thermal destruction of wastesGEN PHOSPHORIX LLC·Filed 1999·Granted Feb 6, 2001·28 cites·7 claims
- 0862US6596993B1Method of automatically correcting magnification and non-linearity of scanning electron microscopeGEN PHOSPHORIX LLC·Filed 2000·Granted Jul 22, 2003·5 cites·7 claims
- 0962US6434881B1Device for enhancing photosynthesisGEN PHOSPHORIX LLC·Filed 2000·Granted Aug 20, 2002·7 cites·7 claims
- 1061US6664532B2Method of precision calibration of magnification of scanning microscopes with the use of test diffraction gratingGEN PHOSPHORIX LLC·Filed 2001·Granted Dec 16, 2003·5 cites·4 claims
- 1159US6686587B2Method of precision calibration of magnification of a scanning microscopes with the use of test diffraction gratingGEN PHOSPHORIX LLC·Filed 2001·Granted Feb 3, 2004·7 cites·4 claims
- 1259US6608294B2Simple method of precision calibration of magnification of a scanning microscopes with the use of test diffraction gratingGEN PHOSPHORIX LLC·Filed 2001·Granted Aug 19, 2003·7 cites·5 claims
- 1355US6668099B1Method of measuring an angle of inclination of trapezoidal micro object side facesGEN PHOSPHORIX LLC·Filed 2000·Granted Dec 23, 2003·6 cites·7 claims
- 1454US6573500B2Method of precision calibration of magnification of a scanning microscope with the use of test diffraction gratingGEN PHOSPHORIX LLC·Filed 2001·Granted Jun 3, 2003·5 cites·3 claims
- 1552US7054000B2Method of calibration of magnification of microscopes having different operational principles for bringing them into a single, absolute scaleGEN PHOSPHORIX LLC·Filed 2003·Granted May 30, 2006·6 cites·9 claims
- 1651US6529130B2System for detecting intrudersGEN PHOSPHORIX LLC·Filed 2001·Granted Mar 4, 2003·9 cites·4 claims
- 1743US6807314B1Method of precision calibration of a microscope and the likeGEN PHOSPHORIX LLC·Filed 1999·Granted Oct 19, 2004·15 cites·2 claims
- 1839US7427756B2Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscopeGEN PHOSPHORIX LLC·Filed 2005·Granted Sep 23, 2008·0 cites·6 claims
- 1937US6982138B2Method of controlling removal of photoresist in openings of a photoresist maskGEN PHOSPHORIX LLC·Filed 2003·Granted Jan 3, 2006·0 cites·9 claims
- 2033US6158169AMachine for enhancing photosynthesisGEN PHOSPHORIX LLC·Filed 1998·Granted Dec 12, 2000·8 cites·13 claims
- 2130US7016262B2Seismic sensorGEN PHOSPHORIX LLC·Filed 2003·Granted Mar 21, 2006·0 cites·9 claims
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