Assignee
GCA CORP
40 granted patents·1,302 citations·filing 1974–1985
Top patents by PatentIndex Score
40 records- 0196US4401131AApparatus for cleaning semiconductor wafersGCA CORP·Filed 1981·Granted Aug 30, 1983·95 cites·11 claims
- 0293US3946200AProportional temperature controllerGCA CORP·Filed 1975·Granted Mar 23, 1976·118 cites·12 claims
- 0390US4616908AMicrolithographic systemGCA CORP·Filed 1984·Granted Oct 14, 1986·78 cites·1 claims
- 0490US4518848AApparatus for baking resist on semiconductor wafersGCA CORP·Filed 1981·Granted May 21, 1985·74 cites·10 claims
- 0588US3973665AArticle delivery and transport apparatus for evacuated processing equipmentGCA CORP·Filed 1975·Granted Aug 10, 1976·83 cites·9 claims
- 0686US4647172AResist development methodGCA CORP·Filed 1985·Granted Mar 3, 1987·47 cites·3 claims
- 0785US4603466AWafer chuckGCA CORP·Filed 1984·Granted Aug 5, 1986·109 cites·5 claims
- 0885US4567361AReticle bar code and method and apparatus for reading sameGCA CORP·Filed 1983·Granted Jan 28, 1986·61 cites·3 claims
- 0985US4315705AApparatus for handling and treating wafersGCA CORP·Filed 1977·Granted Feb 16, 1982·49 cites·5 claims
- 1084US4425508AElectron beam lithographic apparatusGCA CORP·Filed 1982·Granted Jan 10, 1984·76 cites·7 claims
- 1183US4667415AMicrolithographic reticle positioning systemGCA CORP·Filed 1985·Granted May 26, 1987·51 cites·5 claims
- 1277US4436424AInterferometer using transverse deviation of test beamGCA CORP·Filed 1981·Granted Mar 13, 1984·27 cites·13 claims
- 1377US4206494AHigh throughput illuminatorGCA CORP·Filed 1978·Granted Jun 3, 1980·31 cites·10 claims
- 1475US4278366AAutomatic wafer processing system and methodGCA CORP·Filed 1977·Granted Jul 14, 1981·38 cites·2 claims
- 1574US4640619AMicrolithographic calibration schemeGCA CORP·Filed 1985·Granted Feb 3, 1987·29 cites·2 claims
- 1669US4519717AOn-stream cloud point analyzerGCA CORP·Filed 1982·Granted May 28, 1985·33 cites·6 claims
- 1765US4402607AAutomatic detector for microscopic dust on large-area, optically unpolished surfacesGCA CORP·Filed 1980·Granted Sep 6, 1983·26 cites·27 claims
- 1864US4436985AApparatus for heat treating semiconductor wafersGCA CORP·Filed 1982·Granted Mar 13, 1984·28 cites·2 claims
- 1963US4496423AGas feed for reactive ion etch systemGCA CORP·Filed 1983·Granted Jan 29, 1985·24 cites·8 claims
- 2061US4528635AAutomatic distillation apparatusGCA CORP·Filed 1982·Granted Jul 9, 1985·23 cites·23 claims
- 2161US4139333APositive displacement flow through fluid pumpGCA CORP·Filed 1977·Granted Feb 13, 1979·14 cites·7 claims
- 2260US4325077AAutomatic wafer alignment systemGCA CORP·Filed 1980·Granted Apr 13, 1982·17 cites·15 claims
- 2358US3948564AFluid bearing apparatus and method utilizing selective turntable diverter structureGCA CORP·Filed 1975·Granted Apr 6, 1976·18 cites·23 claims
- 2457US4583856AResolution system for interferometerGCA CORP·Filed 1983·Granted Apr 22, 1986·13 cites·4 claims
- 2555US4517430AMicrowave heating device with constant temperature control of the magnetronGCA CORP·Filed 1983·Granted May 14, 1985·20 cites·18 claims
- 2653US4506005AMethod of catalytic etchingGCA CORP·Filed 1983·Granted Mar 19, 1985·14 cites·6 claims
- 2751US4323763AParametric power controllerGCA CORP·Filed 1979·Granted Apr 6, 1982·12 cites·8 claims
- 2850US4320975APassive smoke plume opacity monitorGCA CORP·Filed 1979·Granted Mar 23, 1982·10 cites·10 claims
- 2949US4556785AApparatus for vapor sheathed baking of semiconductor wafersGCA CORP·Filed 1983·Granted Dec 3, 1985·7 cites·8 claims
- 3042US4444531AAir track apparatusGCA CORP·Filed 1981·Granted Apr 24, 1984·15 cites·3 claims
- 3142US4381452ASystem for measuring trace moisture in a gaseous streamGCA CORP·Filed 1981·Granted Apr 26, 1983·11 cites·10 claims
- 3240US3967127ASample introducerGCA CORP·Filed 1975·Granted Jun 29, 1976·5 cites·6 claims
- 3339US4095891AOn-the-fly photoresist exposure apparatusGCA CORP·Filed 1976·Granted Jun 20, 1978·8 cites·2 claims
- 3437US4253111AApparatus for bonding leads to semiconductor chipsGCA CORP·Filed 1978·Granted Feb 24, 1981·11 cites·6 claims
- 3535US4434217AChalcogenide productGCA CORP·Filed 1981·Granted Feb 28, 1984·5 cites·1 claims
- 3632US3946252AIntegral cycle power controllerGCA CORP·Filed 1974·Granted Mar 23, 1976·4 cites·2 claims
- 3730US4352607AAutomatic wafer processing system and methodGCA CORP·Filed 1980·Granted Oct 5, 1982·7 cites·3 claims
- 3830US4025242AVacuum pump oilingGCA CORP·Filed 1975·Granted May 24, 1977·2 cites·8 claims
- 3929US4502871AApparatus and method for separating wax from an entrainer gasGCA CORP·Filed 1983·Granted Mar 5, 1985·7 cites·25 claims
- 4029US4047627AMask plate handling methodGCA CORP·Filed 1976·Granted Sep 13, 1977·2 cites·4 claims
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