Assignee
FUJII YOSHINORI
JP·8 granted patents·8 pending applications·26 citations·filing 2003–2012
Top patents by PatentIndex Score
16 records- 0191US8141926B2Robot hand for substrate transferFUJII YOSHINORI·Filed 2009·Granted Mar 27, 2012·15 cites·3 claims
- 0278US8393662B2Robot hand for substrate transferFUJII YOSHINORI·Filed 2011·Granted Mar 12, 2013·3 cites·8 claims
- 0370US8688246B2Operation monitoring system for processing apparatusFUJII YOSHINORI·Filed 2009·Granted Apr 1, 2014·3 cites·12 claims
- 0469US9139381B2Transport apparatus and vacuum systemFUJII YOSHINORI·Filed 2012·Granted Sep 22, 2015·2 cites·18 claims
- 0566US8543235B2Method of controlling transfer robotFUJII YOSHINORI·Filed 2009·Granted Sep 24, 2013·2 cites·8 claims
- 0662US8688276B2Teaching method for transfer robotFUJII YOSHINORI·Filed 2009·Granted Apr 1, 2014·1 cites·10 claims
- 0749US8390230B2Method of detecting stop of transport apparatusFUJII YOSHINORI·Filed 2008·Granted Mar 5, 2013·0 cites·4 claims
- 0849US2013092528A1Film-forming device and film-forming methodFUJII YOSHINORI·Filed 2011·Application pending·0 cites
- 0949US2006011638A1Packaging container and method of producing the sameFUJII YOSHINORI·Filed 2003·Application pending·0 cites
- 1048US2010256811A1Diagnosis system for transport robotFUJII YOSHINORI·Filed 2008·Application pending·0 cites
- 1147US2012103793A1Vacuum film-forming apparatus and position detection method for shutter plate of vacuum film-forming apparatusFUJII YOSHINORI·Filed 2010·Application pending·0 cites
- 1246US2011013338A1Electrostatic chuck deviceFUJII YOSHINORI·Filed 2010·Application pending·0 cites
- 1345US2011014015A1Substrate transfer robot and vacuum processing apparatus provided with sameFUJII YOSHINORI·Filed 2008·Application pending·0 cites
- 1443US2010287768A1Mehtod of manufacturing electrostatic chuck mechanismFUJII YOSHINORI·Filed 2008·Application pending·0 cites
- 1539US9093485B2Transport methodFUJII YOSHINORI·Filed 2011·Granted Jul 28, 2015·0 cites·4 claims
- 1637US2012116586A1Teaching apparatus of robot and teaching method of robotFUJII YOSHINORI·Filed 2010·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →