Assignee
FOCUS SEMICONDUCTOR SYSTEMS
US·3 granted patents·193 citations·filing 1985–1987
Top patents by PatentIndex Score
3 records- 0190US4845054ALow temperature chemical vapor deposition of silicon dioxide filmsFOCUS SEMICONDUCTOR SYSTEMS·Filed 1987·Granted Jul 4, 1989·149 cites·1 claims
- 0276US4834022ACVD reactor and gas injection systemFOCUS SEMICONDUCTOR SYSTEMS·Filed 1987·Granted May 30, 1989·34 cites·18 claims
- 0349US4673799AFluidized bed heater for semiconductor processingFOCUS SEMICONDUCTOR SYSTEMS·Filed 1985·Granted Jun 16, 1987·10 cites·5 claims
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