Assignee
EPILUVAC AB
SE·2 granted patents·2 pending applications·0 citations·filing 2013–2021
Top patents by PatentIndex Score
4 records- 0148US10017877B2Silicon carbide crystal growth in a CVD reactor using chlorinated chemistryEPILUVAC AB·Filed 2013·Granted Jul 10, 2018·0 cites·13 claims
- 0241US2023257876A1Device and method to achieve homogeneous growth and doping of semiconductor wafers with a diameter greater than 100 mmEPILUVAC AB·Filed 2021·Application pending·0 cites
- 0340US12180592B2Device and method for ensuring planarity of a semiconductor wafer during epitaxial growthEPILUVAC AB·Filed 2020·Granted Dec 31, 2024·0 cites·9 claims
- 0429US2018002809A1Cvd reactor with a multi-zone heated process chamberEPILUVAC AB·Filed 2017·Application pending·0 cites
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