Assignee
ENI TECH INC
US·10 granted patents·1,079 citations·filing 1996–1998
Top patents by PatentIndex Score
10 records- 0195US5971591AProcess detection system for plasma processENI TECH INC·Filed 1997·Granted Oct 26, 1999·184 cites·18 claims
- 0294US5810982APreferential sputtering of insulators from conductive targetsENI TECH INC·Filed 1996·Granted Sep 22, 1998·134 cites·5 claims
- 0393US5726603ALinear RF power amplifierENI TECH INC·Filed 1997·Granted Mar 10, 1998·130 cites·12 claims
- 0492US6046641AParallel HV MOSFET high power stable amplifierENI TECH INC·Filed 1998·Granted Apr 4, 2000·159 cites·33 claims
- 0592US5770922ABaseband V-I probeENI TECH INC·Filed 1996·Granted Jun 23, 1998·140 cites·15 claims
- 0684US6020794ARatiometric autotuning algorithm for RF plasma generatorENI TECH INC·Filed 1998·Granted Feb 1, 2000·144 cites·12 claims
- 0780US5842154AFuzzy logic tuning of RF matching networkENI TECH INC·Filed 1997·Granted Nov 24, 1998·63 cites·8 claims
- 0876US6020636AKilowatt power transistorENI TECH INC·Filed 1997·Granted Feb 1, 2000·55 cites·11 claims
- 0973US5717293AStrike enhancement circuit for a plasma generatorENI TECH INC·Filed 1997·Granted Feb 10, 1998·62 cites·11 claims
- 1037US6064559AFiber optic position sensor for tuning capacitorENI TECH INC·Filed 1998·Granted May 16, 2000·8 cites·11 claims
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