Assignee

ELECTRONICS AND TELECMMUNICATI

KR·1 granted patent·12 citations·filing 1998–1998

Technology mixC30B1 H10P1

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0137US6063201AEffusion cell assembly for epitaxial apparatusELECTRONICS AND TELECMMUNICATI·Filed 1998·Granted May 16, 2000·12 cites·5 claims

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