Assignee
EBARA TECH INC
US·10 granted patents·299 citations·filing 1991–2005
Top patents by PatentIndex Score
10 records- 0182US5513499AMethod and apparatus for cryopump regeneration using turbomolecular pumpEBARA TECH INC·Filed 1994·Granted May 7, 1996·105 cites·32 claims
- 0279US7125326B2Apparatus and method for removing a CMP polishing pad from a platenEBARA TECH INC·Filed 2005·Granted Oct 24, 2006·10 cites·15 claims
- 0376US7326103B2Vertically adjustable chemical mechanical polishing head and method for use thereofEBARA TECH INC·Filed 2003·Granted Feb 5, 2008·20 cites·24 claims
- 0475US5386708ACryogenic vacuum pump with expander speed controlEBARA TECH INC·Filed 1993·Granted Feb 7, 1995·52 cites·3 claims
- 0575US5305612ACryopump method and apparatusEBARA TECH INC·Filed 1992·Granted Apr 26, 1994·36 cites·10 claims
- 0671US5357760AHybrid cryogenic vacuum pump apparatus and method of operationEBARA TECH INC·Filed 1993·Granted Oct 25, 1994·33 cites·17 claims
- 0770US6916226B2Chemical mechanical polishing apparatus having a stepped retaining ring and method for use thereofEBARA TECH INC·Filed 2002·Granted Jul 12, 2005·13 cites·21 claims
- 0861US7004822B2Chemical mechanical polishing and pad dressing methodEBARA TECH INC·Filed 2003·Granted Feb 28, 2006·9 cites·14 claims
- 0954US6913514B2Chemical mechanical polishing endpoint detection system and methodEBARA TECH INC·Filed 2003·Granted Jul 5, 2005·5 cites·21 claims
- 1049US5231839AMethods and apparatus for cryogenic vacuum pumping with reduced contaminationEBARA TECH INC·Filed 1991·Granted Aug 3, 1993·16 cites·14 claims
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