Assignee
DMITRIEV VLADIMIR
IL·5 granted patents·21 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0193US9658527B2Correction of errors of a photolithographic mask using a joint optimization processDMITRIEV VLADIMIR·Filed 2011·Granted May 23, 2017·14 cites·25 claims
- 0276US9753366B2Method and apparatus for the determination of laser correcting tool parametersDMITRIEV VLADIMIR·Filed 2011·Granted Sep 5, 2017·4 cites·12 claims
- 0369US9207530B2Analyses of measurement dataDMITRIEV VLADIMIR·Filed 2011·Granted Dec 8, 2015·2 cites·46 claims
- 0460US9606444B2Method and apparatus for locally deforming an optical element for photolithographyDMITRIEV VLADIMIR·Filed 2012·Granted Mar 28, 2017·1 cites·22 claims
- 0539US8869076B2Global landmark method for critical dimension uniformity reconstructionDMITRIEV VLADIMIR·Filed 2011·Granted Oct 21, 2014·0 cites·12 claims
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