Assignee
CONVAC GMBH
DE·3 granted patents·200 citations·filing 1988–1988
Top patents by PatentIndex Score
3 records- 0187US5083364ASystem for manufacturing semiconductor substratesCONVAC GMBH·Filed 1988·Granted Jan 28, 1992·129 cites·28 claims
- 0275US4979464AApparatus for treating wafers in the manufacture of semiconductor elementsCONVAC GMBH·Filed 1988·Granted Dec 25, 1990·59 cites·29 claims
- 0340US5069155AApparatus for in-line lacquering of compact disksCONVAC GMBH·Filed 1988·Granted Dec 3, 1991·12 cites·11 claims
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