Assignee
CHUNG HUA
US·3 granted patents·1 pending application·34 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0192US8324095B2Integration of ALD tantalum nitride for copper metallizationCHUNG HUA·Filed 2009·Granted Dec 4, 2012·18 cites·15 claims
- 0268US8910644B2Method and apparatus for inducing turbulent flow of a processing chamber cleaning gasCHUNG HUA·Filed 2011·Granted Dec 16, 2014·2 cites·14 claims
- 0364USD664170SCleaning plate for inducing turbulent flow of a processing chamber cleaning glassCHUNG HUA·Filed 2011·Granted Jul 24, 2012·14 cites·1 claims
- 0448US2012000490A1Methods for enhanced processing chamber cleaningCHUNG HUA·Filed 2011·Application pending·0 cites
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