Assignee
CFM TECHNOLOGIES LTD
US·3 granted patents·584 citations·filing 1985–1988
Top patents by PatentIndex Score
3 records- 0196US4917123AApparatus for treating wafers with process fluidsCFM TECHNOLOGIES LTD·Filed 1988·Granted Apr 17, 1990·223 cites·24 claims
- 0295US4778532AProcess and apparatus for treating wafers with process fluidsCFM TECHNOLOGIES LTD·Filed 1985·Granted Oct 18, 1988·259 cites·58 claims
- 0389US4633893AApparatus for treating semiconductor wafersCFM TECHNOLOGIES LTD·Filed 1985·Granted Jan 6, 1987·102 cites·17 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →