Assignee
CELERITY GROUP INC
US·6 granted patents·305 citations·filing 2002–2005
Top patents by PatentIndex Score
6 records- 0196US6962164B2System and method for a mass flow controllerCELERITY GROUP INC·Filed 2002·Granted Nov 8, 2005·79 cites·28 claims
- 0296US6752166B2Method and apparatus for providing a determined ratio of process fluidsCELERITY GROUP INC·Filed 2002·Granted Jun 22, 2004·137 cites·21 claims
- 0386US7114511B2System and method for a mass flow controllerCELERITY GROUP INC·Filed 2005·Granted Oct 3, 2006·12 cites·13 claims
- 0485US6845659B2Variable resistance sensor with common reference legCELERITY GROUP INC·Filed 2003·Granted Jan 25, 2005·29 cites·33 claims
- 0584US6769463B2Fluid flow systemCELERITY GROUP INC·Filed 2002·Granted Aug 3, 2004·29 cites·21 claims
- 0675US6826953B2Flow sensorCELERITY GROUP INC·Filed 2003·Granted Dec 7, 2004·19 cites·15 claims
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