Assignee
BUSWELL SHEN
2 granted patents·1 pending application·4 citations·filing 2004–2007
Top patents by PatentIndex Score
3 records- 0170US8510948B2Methods and systems for forming slots in a semiconductor substrateBUSWELL SHEN·Filed 2007·Granted Aug 20, 2013·4 cites·13 claims
- 0231US7429335B2Substrate passage formationBUSWELL SHEN·Filed 2004·Granted Sep 30, 2008·0 cites·55 claims
- 0330US2005236358A1Micromachining methods and systemsBUSWELL SHEN·Filed 2004·Application pending·0 cites
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