Assignee
BOEHM KLAUS
DE·1 granted patent·1 pending application·3 citations·filing 2006–2006
Top patents by PatentIndex Score
2 records- 0160US8705838B2Method for mask inspection for mask design and mask productionBOEHM KLAUS·Filed 2006·Granted Apr 22, 2014·3 cites·18 claims
- 0232US2006291031A1Arrangement of aperture diaphragms and/or filters, with changeable characteristics for optical devicesBOEHM KLAUS·Filed 2006·Application pending·0 cites
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