Individual holder
BERGSTEDT ROBERT A
US·2 granted patents·33 citations·filing 2009–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
2 records- 0188US8681427B2System and method for separating a main pulse and a pre-pulse beam from a laser sourceBERGSTEDT ROBERT A·Filed 2012·Granted Mar 25, 2014·20 cites·24 claims
- 0278US8173985B2Beam transport system for extreme ultraviolet light sourceBERGSTEDT ROBERT A·Filed 2009·Granted May 8, 2012·13 cites·38 claims
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