Assignee
BANNA SAMER
US·2 granted patents·18 citations·filing 2011–2012
Top patents by PatentIndex Score
2 records- 0190US8974684B2Synchronous embedded radio frequency pulsing for plasma etchingBANNA SAMER·Filed 2012·Granted Mar 10, 2015·15 cites·18 claims
- 0271US8492980B2Methods for calibrating RF power applied to a plurality of RF coils in a plasma processing systemBANNA SAMER·Filed 2011·Granted Jul 23, 2013·3 cites·20 claims
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