Assignee
ATMI ECOSYS CORP
US·13 granted patents·1,056 citations·filing 1995–1998
Top patents by PatentIndex Score
13 records- 0196US5955037AEffluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gasesATMI ECOSYS CORP·Filed 1996·Granted Sep 21, 1999·156 cites·49 claims
- 0293US5622682AMethod for concentration and recovery of halocarbons from effluent gas streamsATMI ECOSYS CORP·Filed 1995·Granted Apr 22, 1997·53 cites·16 claims
- 0392US6030591AProcess for removing and recovering halocarbons from effluent process streamsATMI ECOSYS CORP·Filed 1998·Granted Feb 29, 2000·86 cites·16 claims
- 0491US5779998AMethod and apparatus for concentration and recovery of halocarbons from effluent gas streamsATMI ECOSYS CORP·Filed 1996·Granted Jul 14, 1998·41 cites·9 claims
- 0590US5914091APoint-of-use catalytic oxidation apparatus and method for treatment of voc-containing gas streamsATMI ECOSYS CORP·Filed 1996·Granted Jun 22, 1999·95 cites·29 claims
- 0690US5851293AFlow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operationsATMI ECOSYS CORP·Filed 1996·Granted Dec 22, 1998·339 cites·60 claims
- 0788US5935283AClog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing systemATMI ECOSYS CORP·Filed 1997·Granted Aug 10, 1999·85 cites·19 claims
- 0884US5846275AClog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing systemATMI ECOSYS CORP·Filed 1996·Granted Dec 8, 1998·64 cites·21 claims
- 0983US5833888AWeeping weir gas/liquid interface structureATMI ECOSYS CORP·Filed 1996·Granted Nov 10, 1998·53 cites·19 claims
- 1076US5676712AFlashback protection apparatus and method for suppressing deflagration in combustion-susceptible gas flowsATMI ECOSYS CORP·Filed 1995·Granted Oct 14, 1997·51 cites·17 claims
- 1153US5873388ASystem for stabilization of pressure perturbations from oxidation systems for treatment of process gases from semiconductor manufacturing operationsATMI ECOSYS CORP·Filed 1996·Granted Feb 23, 1999·15 cites·21 claims
- 1242US5882366AAlternating wash/dry water scrubber entryATMI ECOSYS CORP·Filed 1997·Granted Mar 16, 1999·13 cites·23 claims
- 1326US5777058AMetallo-oxomeric scrubber compositionsATMI ECOSYS CORP·Filed 1996·Granted Jul 7, 1998·5 cites·29 claims
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