Assignee
ASM AMERICA
US·4 granted patents·102 citations·filing 2000–2003
Top patents by PatentIndex Score
4 records- 0190US6666924B1Reaction chamber with decreased wall depositionASM AMERICA·Filed 2000·Granted Dec 23, 2003·36 cites·10 claims
- 0287US6609869B2Transfer chamber with integral loadlock and staging stationASM AMERICA·Filed 2001·Granted Aug 26, 2003·40 cites·24 claims
- 0385US6564810B1Cleaning of semiconductor processing chambersASM AMERICA·Filed 2000·Granted May 20, 2003·20 cites·20 claims
- 0448US6708700B2Cleaning of semiconductor processing chambersASM AMERICA·Filed 2003·Granted Mar 23, 2004·6 cites·17 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →