Assignee
ASIA PACIFIC SYSTEMS INC
KR·1 granted patent·3 pending applications·1 citations·filing 2008–2009
Top patents by PatentIndex Score
4 records- 0149US8346068B2Substrate rotating and oscillating apparatus for rapid thermal processASIA PACIFIC SYSTEMS INC·Filed 2008·Granted Jan 1, 2013·1 cites·17 claims
- 0244US2011254451A1Apparatus and method for preventing lamp damage in rapid heat treatment equipmentASIA PACIFIC SYSTEMS INC·Filed 2009·Application pending·0 cites
- 0341US2011255847A1Rapid heat treatment apparatus that enables extended pyrometer lifeASIA PACIFIC SYSTEMS INC·Filed 2009·Application pending·0 cites
- 0433US2011002676A1Heater block of rapid thermal process apparatusASIA PACIFIC SYSTEMS INC·Filed 2008·Application pending·0 cites
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