Assignee
ADVANCED MAT SOLUTIONS
US·1 granted patent·1 pending application·0 citations·filing 2023–2023
Top patents by PatentIndex Score
2 records- 0151US12595589B2Chemical vapor deposition reactor in polysilicon production processADVANCED MAT SOLUTIONS·Filed 2023·Granted Apr 7, 2026·0 cites·16 claims
- 0247US2024182497A1Method and system for selective recovery of monochlorosilane and dichlorosilane in polysilicon production processADVANCED MAT SOLUTIONS·Filed 2023·Application pending·0 cites
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