USD614152SActiveUtility

Substrate transfer device for semiconductor deposition apparatus

45
Assignee: ASM GENITECH KOREA LTDPriority: Jul 21, 2008Filed: Jan 16, 2009Granted: Apr 20, 2010
Est. expiryJul 21, 2028(~2 yrs left)· nominal 20-yr term from priority
Inventors:Jeong Ho LeeSang Jin JeongYoung Seok Choi
45
PatentIndex Score
5
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a substrate transfer device for semiconductor deposition apparatus, as shown and described.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.