US2017191176A1PendingUtilityA1
Controlling dimensions of nanowires
Assignee: HEWLETT PACKARD DEVELOPMENT CO LPPriority: Jan 29, 2013Filed: Mar 15, 2017Published: Jul 6, 2017
Est. expiryJan 29, 2033(~6.5 yrs left)· nominal 20-yr term from priority
H05K 2203/1142G03F 7/038G03F 7/2004C23C 18/1633H05K 3/007B82Y 40/00H05K 2203/0548G03F 7/0002H05K 3/20H05K 3/0023H05K 1/09C25D 1/006G03F 7/2037C25D 1/04G03F 7/2039G03F 7/2006Y10S977/882Y10S977/762B82B 3/0033Y10S977/932
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Claims
Abstract
Controlling dimensions of nanowires includes lithographically forming a trench in a layer of a polymer resin with a width less than one micrometer where the polymer resin has a thickness less than one micrometer and is deposited over an electrically conductive substrate, depositing a nanowire material within the trench to form a nanowire, and obtaining the nanowire from the trench with a removal mechanism.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A system for forming nanowires, the system comprising:
an optical lithography machine to use a light mask to photo-lithographically form a trench in a layer of a polymer resin with a width less than one micrometer and a length corresponding to a desired length of a nanowire to be formed, the polymer resin being deposited over an electrically conductive substrate; an etcher to expose a surface of the conductive substrate underlying a bottom of the trench; a material depositing machine to deposit a metallic nanowire material within the trench over the exposed surface of the conductive substrate at the bottom of the trench to form a metallic nanowire longitudinally along the substrate, a length of the nanowire corresponding to a length of the trench; and a removal mechanism for removing the nanowire from the substrate to obtain the nanowire.
2 . The system of claim 1 , further comprising an applicator for forming an electrically conductive pathway between a first electrode and a second electrode by applying a liquid solution, carrying the nanowire, between the first and second electrode.
3 . The system of claim 2 , wherein the nanowire is at least as long as a distance between the first and second electrodes.
4 . The system of claim 1 , the material depositing machine to deposit a first material into the trench and deposit a second, different material over the first material within the trench.
5 . The system of claim 1 , the material depositing machine to deposit the nanowire material within the trench to form the nanowire by any of direct current electroplating, pulse electroplating, and reverse electroplating.
6 . The system of claim 1 , the optical lithography machine to form the trench with a length to width aspect ratio of at least one to a thousand.
7 . The system of claim 1 , the removal mechanism further comprising a substrate degradation mechanism that includes a solvent for dissolving the substrate to remove the nanowire from the substrate.
8 . The system of claim 1 , the removal mechanism to remove the nanowire from the substrate by peeling the polymer resin and the nanowire away from the electrically conductive substrate.
9 . The system of claim 8 , further comprising a bonding device to bond a second substrate to the polymer resin and the nanowire.
11 . The system of claim 1 , the optical lithography machine to form the trench with a width between 1 and 300 nanometers.
12 . A device comprising a nanowire formed by:
placing a light mask on a layer of polymer resin; using optical lithography with the light mask, photo-lithographically forming a trench in the layer of a polymer resin, the trench having sidewalls and a bottom with a width less than one micrometer and a length corresponding to a desired length of a nanowire to be formed, said polymer resin being deposited over an electrically conductive substrate; exposing a surface of the conductive substrate at the bottom and between the sidewalls of the trench; depositing a metallic nanowire material by electroplating within said trench over the exposed surface of the conductive substrate at he bottom of the trench to form a metallic nanowire longitudinally along said substrate, a length of said nanowire corresponding to a length of said trench; and removing said nanowire from said substrate with a removal mechanism.
13 . The device of claim 12 , further comprising:
a first electrode spaced apart from a second electrode by a distance, and an electrically conductive pathway formed between the first and second electrode; the electrically conductive pathway comprising the nanowire.
14 . The device of claim 13 , further comprising the nanowire suspended in a droplet of fluid between the first and second electrodes.
15 . The device of claim 13 , wherein the nanowire comprises a length at least as long as the distance between the first and second electrodes.
16 . A device comprising:
a first electrode spaced apart from a second electrode by a distance, and an electrically conductive pathway formed between the first and second electrode; the electrically conductive pathway comprising a nanowire suspended in a droplet of fluid between the first and second electrodes, the nanowire having a length at least as long as the distance between the first and second electrodes.
17 . The device of claim 16 , wherein the nanowire is formed by:
placing a light mask on a layer of polymer resin; using optical lithography with the light mask, photo-lithographically forming a trench in the layer of a polymer resin, the trench having sidewalls and a bottom with a width less than one micrometer and a length corresponding to a desired length of a nanowire to be formed, said polymer resin being deposited over an electrically conductive substrate; exposing a surface of the conductive substrate at the bottom and between the sidewalls of the trench; depositing a metallic nanowire material by electroplating within said trench over the exposed surface of the conductive substrate at he bottom of the trench to form a metallic nanowire longitudinally along said substrate, a length of said nanowire corresponding to a length of said trench; and removing said nanowire from said substrate with a removal mechanism.Cited by (0)
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