Reagent for enhancing generation of chemical species and manufacturing apparatus

Abstract

A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.

1 .- 21 . (canceled) 
     
     
         22 . A composition used in the method of  claim 42 , the composition comprising:
 a first reagent capable of generating a first chemical species in at least one of the composition, a solution containing the composition, and a film formed from the composition; and   a precursor that is capable of generating a second chemical species through an interaction with the first chemical species.   
     
     
         23 . The composition of  claim 22 , wherein the first reagent is capable of generating the first chemical species through a first exposure of at least one of the composition, the solution, and the film to at least one of a first electromagnetic ray having a first wavelength and a first particle ray. 
     
     
         24 . The composition of  claim 22 , wherein the precursor is capable of generating the second chemical species through a second exposure of at least one of the composition, the solution, and the film to at least one of a second electromagnetic ray having a second wavelength and a second particle ray. 
     
     
         25 . The composition of  claim 22 , wherein:
 the first chemical species is capable of generating a first product; and   the first product is capable of acting as a photosensitizer.   
     
     
         26 . The composition of  claim 22 , wherein:
 the first chemical species is capable of generating a first product; and   the precursor is capable of generating the second chemical species through a third exposure of at least one of the composition, the solution, and the film by at least one of a third electromagnetic ray having a third wavelength and a third particle ray.   
     
     
         27 . The composition of  claim 23 , wherein the first electromagnetic ray and the first particle ray is an extreme ultraviolet light. 
     
     
         28 . The composition of  claim 26 , wherein:
 the third exposure is carried out using the third electromagnetic ray; and   the third wavelength is longer than 250 nm.   
     
     
         29 . The composition of  claim 24 , wherein the second wavelength is longer than the third wavelength. 
     
     
         30 .- 41 . (canceled) 
     
     
         42 . A method of manufacturing a device, the method comprising: placing a composition on a member such that a film including the composition is disposed on the member;
 first exposing the film to at least one of an electron beam and a first light, the wavelength of which is shorter than 50 nm;   second exposing the film to a second light, the wavelength of which is different than the first wavelength; and   third exposing the film to at least one of a third electromagnetic ray having a third wavelength and a third particle ray,   wherein
 the second wavelength is longer than the third wavelength; 
 the third wavelength is longer than the first wavelength; and 
 the composition includes a first reagent able to generate a first chemical species and a precursor that generates a second chemical species. 
   
     
     
         43 .- 44 . (canceled) 
     
     
         45 . The method of  claim 42 , wherein a first period in which the first exposure is carried out does not overlap temporally a second period in which the second exposing exposure is carried out. 
     
     
         46 . The method of  claim 42 , wherein:
 the first chemical species is generated by the first exposure; and   the first chemical species is a ketyl radical.   
     
     
         47 . The method of  claim 42 , wherein:
 a first product is generated from the first chemical species; and   the first product is a ketone compound.   
     
     
         48 . (canceled) 
     
     
         49 . The method of  claim 42 , wherein the precursor generates a second chemical species by the third exposure. 
     
     
         50 . The method of  claim 42 , wherein the first product enhances the generation of the second chemical species from the precursor by absorbing the third electromagnetic ray. 
     
     
         51 . The method of  claim 42 ,
 wherein:   the first chemical species has a lifetime in the film; and   the first chemical species is excited within the lifetime of the first chemical species by the second exposure.   
     
     
         52 . The method of  claim 51 , wherein:
 the first chemical species is generated by the first exposure; and   the exciting of the first chemical species is carried out by the second exposure.   
     
     
         53 . The method of  claim 42 , wherein the second wavelength is longer than 400 nm. 
     
     
         54 . The method of  claim 53 , wherein the third wavelength is longer than 250 nm. 
     
     
         55 . The method of  claim 42 , wherein the first reagent is an alcohol compound or an alcohol derivative with a hydroxyl group protected, as an acid generation enhancer. 
     
     
         56 . The composition of  claim 22 , wherein the first reagent is an alcohol compound or an alcohol derivative with a hydroxyl group protected, as an acid generation enhancer. 
     
     
         57 . The method of  claim 42 , wherein the first reagent is an alcohol derivative with a protected hydroxyl group. 
     
     
         58 . The composition of  claim 22 , wherein the first reagent is an alcohol derivative with a protected hydroxyl group. 
     
     
         59 . The composition of  claim 23 , wherein the first particle ray is an electron beam.