Pump

Abstract

A vacuum pump has at least one side passage pump stage which comprises a side passage bounded by at least one stator element and having a coolant circuit for cooling the vacuum pump with a coolant, wherein the coolant circuit has at least one coolant passage for the side passage pump stage which is bounded at least regionally by the stator element.

What is claimed is: 
     
         1 . A pump comprising
 at least one side passage pump stage ( 12 ) having a side passage ( 16 ) bounded by at least one stator element ( 14 ); and   a coolant circuit ( 25 ) for cooling the pump ( 10 ) with a coolant, wherein the coolant circuit ( 25 ) has at least one coolant passage ( 18 ) for the side passage pump stage ( 12 ), said coolant passage being bounded at least regionally by the stator element ( 14 ).   
     
     
         2 . The pump in accordance with  claim 1 , wherein the coolant circuit ( 25 ) is configured for cooling at least one further component ( 20 ,  22 ,  24 ) of the pump ( 10 ). 
     
     
         3 . The pump in accordance with  claim 2 , wherein the component is selected from the group comprising drive electronics ( 20 ), a motor ( 22 ), a pump stage, a high vacuum pump stage ( 24 ), a housing and a bearing plate of the pump ( 10 ). 
     
     
         4 . The pump in accordance with  claim 2 , wherein the coolant circuit ( 25 ) comprises a further coolant passage ( 26 ) for the further component ( 20 ,  22 ,  24 ). 
     
     
         5 . The pump in accordance with  claim 4 , wherein the component is connected in a coolant conducting manner in series or in parallel to the coolant passage ( 18 ) for the side passage pump stage ( 12 ). 
     
     
         6 . The pump in accordance with  claim 1 , wherein at least one diaphragm which bounds a flow cross-section for the coolant is provided in the coolant circuit ( 25 ). 
     
     
         7 . The pump in accordance with  claim 6 , wherein the at least one diaphragm is an adjustable diaphragm. 
     
     
         8 . The pump in accordance with  claim 1 , further comprising a temperature sensor ( 28 ) for measuring the temperature of the side passage pump stage ( 12 ). 
     
     
         9 . The pump in accordance with  claim 8 , wherein the temperature sensor ( 28 ) is arranged between the coolant passage ( 18 ) and the side passage ( 16 ). 
     
     
         10 . The pump in accordance with  claim 8 , wherein the temperature sensor ( 28 ) is arranged in the proximity of a gas outlet ( 36 ) of the side passage pump stage ( 12 ). 
     
     
         11 . The pump in accordance with  claim 1 , wherein the coolant passage ( 18 ) extends over at least approximately the total length of the side passage ( 12 ). 
     
     
         12 . The pump in accordance with  claim 1 , wherein the coolant passage further comprises at least one of a coolant inlet arranged in the proximity of a gas outlet ( 36 ) of the side passage pump stage ( 12 ) and a coolant outlet arranged in the proximity of a gas outlet ( 34 ) of the side passage pump stage ( 12 ). 
     
     
         13 . The pump in accordance with  claim 1 , wherein the pump ( 10 ) comprises a plurality of side passage pump stages ( 12 ) which each comprise a side passage ( 16 ) bounded by at least one stator element ( 14 ), wherein the coolant circuit ( 25 ) for the side passage pump stages ( 12 ) respectively comprises at least one coolant passage ( 18 ) and wherein the coolant passages ( 18 ) are each bounded by the stator element ( 14 ) which bounds the side passage ( 16 ) of the respective side passage pump stage ( 12 ). 
     
     
         14 . The pump in accordance with  claim 13 , wherein at least two coolant passages ( 18 ) of different side passage pump stages ( 12 ) are connected to one another in a coolant conducting manner in series or in parallel. 
     
     
         15 . The pump in accordance with  claim 13 , wherein at least two coolant passages ( 18 ) of different side passage pump stages ( 12 ) extend from their respective coolant inlet ( 30 ) in opposite directions about an axis of rotation ( 38 ) of the side passage pump stages ( 12 ) to their respective coolant outlet ( 32 ). 
     
     
         16 . The pump in accordance with  claim 15 , wherein the at least two coolant passages ( 18 ) of different side passage pump stages follow one another directly in the axial direction or in the radial direction. 
     
     
         17 . The pump in accordance with  claim 13 , wherein a return passage ( 40 ) of the coolant circuit ( 25 ) extends through a plurality of stator elements ( 14 ) which bound the side passages ( 16 ) of the side passage pump stages ( 12 ). 
     
     
         18 . The pump in accordance with  claim 1 , wherein the coolant circuit ( 25 ) is coupled in a heat exchanging manner via at least one heat conducting element ( 20 ) to a further coolant circuit ( 42 ). 
     
     
         19 . A pump having at least one side passage pump stage ( 12 ) which comprises a side passage ( 16 ) bounded by at least one stator element ( 14 ), having a motor ( 22 ), having drive electronics ( 20 ) for the motor ( 22 ) and having a coolant circuit ( 25 ) for cooling the pump ( 10 ) with a coolant, wherein the coolant circuit ( 25 ) comprises at least one first coolant passage ( 18 ) for the side passage pump stage ( 12 ) and at least one second coolant passage ( 26 ) for at least one of the motor ( 22 ) and the drive electronics ( 20 ). 
     
     
         20 . The pump in accordance with  claim 13 , wherein the first coolant passage ( 18 ) and the second coolant passage ( 26 ) are connected to one another in a coolant conducting manner in series or in parallel.