Cmp slurry mix and delivery system

Abstract

A CMP slurry mix and delivery system includes at least one container for holding a polishing agent; a pump connected to the container for pumping the polishing agent to a point of use; and a slurry dispersion unit installed between the pump and the point of use, wherein slurry dispersion unit provides megasonic energy that is capable of dispersing the polishing agent flowing through the slurry dispersion unit.

1 . A CMP slurry mix and delivery system, comprising:
 at least one container for holding a polishing agent;   a pump connected to the container for pumping the polishing agent to a point of use; and   a slurry dispersion unit installed between the pump and the point of use, wherein slurry dispersion unit provides megasonic energy that is capable of dispersing the polishing agent flowing through the slurry dispersion unit.   
     
     
         2 . The CMP slurry mix and delivery system according to  claim 1  wherein the slurry dispersion unit comprises a megasonic tank that is filled with a fluid. 
     
     
         3 . The CMP slurry mix and delivery system according to  claim 2  wherein the fluid does not contact with the polishing agent. 
     
     
         4 . The CMP slurry mix and delivery system according to  claim 2  wherein the fluid comprises water. 
     
     
         5 . The CMP slurry mix and delivery system according to  claim 4  wherein the fluid is pure water. 
     
     
         6 . The CMP slurry mix and delivery system according to  claim 2  wherein the slurry dispersion unit further comprises a spiral tube dipped into the fluid, and wherein the polishing agent flows through the spiral tube. 
     
     
         7 . The CMP slurry mix and delivery system according to  claim 6  wherein the spiral tube is made of plastic materials, metal, or silicone. 
     
     
         8 . The CMP slurry mix and delivery system according to  claim 6  wherein number of turns of the spiral tube is determined by a retention time of the polishing agent flowing through the spiral tube within the megasonic tank. 
     
     
         9 . The CMP slurry mix and delivery system according to  claim 6  wherein the slurry dispersion unit further comprises a transducer coupled to the fluid held by the megasonic tank and the polishing agent flowing through the spiral tube. 
     
     
         10 . The CMP slurry mix and delivery system according to  claim 6  wherein the slurry dispersion unit further comprises a heater for altering temperature of the fluid as well as temperature of the polishing agent flowing through the spiral tube.