Biaxial mirror color selecting micro mirror imager

Abstract

A controllable reflecting device having an array of bi-axial mirrors that are capable of pivoting in at least four directions is described. Each micro-mirror of the micro-mirror array is supported through a torsion pivot by a yoke attached by a second coplanar orthogonal torsion pivot to the mirror array support. The mirror and yoke are electrically conductive to a common node on the mirror array support shared by all the mirror/yoke assemblies. Under each mirror/yoke assembly the mirror array support has four plate areas electrically isolated from each other and the mirror/yoke assembly. In response to electrical signals from driver switches integrated in the mirror array support, these plate areas, driven in pairs, selectively provide an electric field with respect to the common node. This electric field attracts the mirror and yoke to facilitate movement of the mirror/yoke assembly to a desired reflecting state.

1 . A projection system having a plurality of micro-mirror, comprising:
 a plate having at least four conductive regions therein;   a mirror;   a yoke positioned between the plate and the mirror; and   first and second pivot means which couple the yoke to the mirror and the plate such that the mirror is moveable in at least four directions.   
   
   
       2 . The projection system of  claim 1  wherein the first pivot means couples the mirror to the yoke. 
   
   
       3 . The projection system of  claim 2  wherein the first pivot means pivots the mirror about a first axis. 
   
   
       4 . The projection system of  claim 3  wherein the second pivot means couples the plate to the yoke. 
   
   
       5 . The projection system of  claim 4  wherein the second pivot means pivots the mirror about a second axis perpendicular to the first axis. 
   
   
       6 . A micro-mirror, comprising:
 a plate having at least four conductive regions therein;   a mirror;   a yoke positioned between the plate and the mirror; and   first and second pivot means which couple the yoke to the mirror and the plate such that the mirror is moveable in at least four directions.   
   
   
       7 . The micro-mirror of  claim 6  wherein the first pivot means couples the mirror to the yoke. 
   
   
       8 . The micro-mirror of  claim 7  wherein the first pivot means pivots the mirror about a first axis. 
   
   
       9 . The micro-mirror of  claim 8  wherein the second pivot means couples the plate to the yoke. 
   
   
       10 . The micro-mirror of  claim 9  wherein the second pivot means pivots the mirror about a second axis perpendicular to the first axis.