CVD coating device

Abstract

The invention relates to a device for depositing especially, crystalline layers onto one or more, especially, also crystalline substrates in a process chamber using reaction gases which are guided into said process chamber, where they undergo pyrolytic reaction. The device has a heatable support plate wherein at least one substrate holder lies loosely, especially rotationally, with its surface flush with the surroundings. A compensation plate which adjoins the at least one substrate holder, following the contours of the same, is provided on the support plate in order to keep the isothermal profile on the support plate as flat as possible.

1 . A device for depositing in particular crystalline layers on one or more, in particular likewise crystalline substrates in a process chamber by means of reaction gases which are introduced into the process chamber, where they react pyrolytically, having a heatable substrate holder, opposite which, at a spacing, there is a cover plate, characterized in that the cover plate, on its side which faces toward the substrate holder, is lined with inert-coated plates or plates which consist of inert material.  
   
   
       2 . The device according to  claim 1  or in particular according thereto, characterized in that the plates are formed as lining rings disposed concentrically with respect to one another.  
   
   
       3 . The device according to  claim 2  or in particular according thereto, characterized in that the lining rings consist of TaC or of TaC- or SiC-coated graphite.  
   
   
       4 . The device according to  claim 3  or in particular according thereto, characterized in that the innermost lining ring is supported by a gas admission element, and in each case the outer rings are supported, in each case by means of their inner edge, on in each case the outer edge of in each case the adjacent inner ring.  
   
   
       5 . The device according to  claim 4  or in particular according thereto, characterized in that the inner one of the lining rings disposed concentrically with respect to one another is of multipart construction.