Container for storing and transporting liquid chemical agent

Abstract

The present invention provides a container for transporting and/or storing a liquid chemical with heat insulation. This liquid chemical container is characterized by having a double structure comprising an outer cylinder and an inner cylinder, wherein a space defined by the outer cylinder and the inner cylinder is substantially vacuum or packed with a heat insulating material. The liquid chemical container may further comprise a temperature controller, for example, a Peltier element, for controlling the temperature of a liquid chemical filled into the inner cylinder.

1 . A liquid chemical container having a double structure comprising an outer cylinder and an inner cylinder, wherein a space defined by the outer cylinder and the inner cylinder is substantially vacuum or packed with a heat insulating material.  
   
   
       2 . The liquid chemical container according to  claim 1 , which further comprises a temperature controller for controlling the temperature of a liquid chemical filled into the inner cylinder.  
   
   
       3 . The liquid chemical container according to  claim 2 , wherein said temperature controller comprises a Peltier element.  
   
   
       4 . The liquid chemical container according to  claim 1 , wherein said liquid chemical is a liquid chemical for an electronic material.  
   
   
       5 . The liquid chemical container according to  claim 4 , wherein said liquid chemical is selected from photoresist composition, rinsing liquids, developing solutions, stripping liquids, etching liquids, and solvents.  
   
   
       6 . The liquid chemical container according to  claim 2  wherein the temperature controller comprises piping that is in contact with the liquid chemical filled into the inner cylinder.  
   
   
       7 . The liquid chemical container according to  claim 6  wherein the space defined by the outer cylinder and the inner cylinder is substantially vacuum.  
   
   
       8 . The liquid chemical container according to  claim 6  wherein the space defined by the outer cylinder and the inner cylinder is packed with a heat insulating material.  
   
   
       9 . The liquid chemical container according to  claim 2  wherein the temperature controller comprises piping that is in contact with the outer surface of the inner cylinder.  
   
   
       10 . A liquid chemical container having a double structure comprising an outer cylinder and an inner cylinder, wherein a space defined by the outer cylinder and the inner cylinder is substantially vacuum or packed with a heat insulating material and a temperature controller for controlling the temperature of a liquid chemical filled into the inner cylinder.