Composite conditioning tool

Abstract

A conditioning tool is useful for treating the polishing surface of a polishing pad. The tool has a base for supporting conditioning materials. The base has an abrasive section for cutting a polishing surface of the polishing pad and a polymeric section for treating the polishing surface of the polishing pad. The polymeric section is operable in a first position with only the polymeric section in contact with the polishing surface of the polishing pad and operable in a second position with the abrasive section in contact with the polishing surface of the polishing pad.

1 . A conditioning tool useful for treating the polishing surface of a polishing pad, comprising: 
 a base for supporting conditioning materials; the base having an abrasive section for cutting a polishing surface of the polishing pad; and a polymeric section for treating the polishing surface of the polishing pad, the polymeric section being operable in a first position with only the polymeric section in contact with the polishing surface of the polishing pad and operable in a second position with the abrasive section in contact with the polishing surface of the polishing pad.    
     
     
         2 . The conditioning tool of  claim 1  wherein a bladder controls movement and downward force of the polymeric section independent of the abrasive section.  
     
     
         3 . The conditioning tool of  claim 1  wherein an electromechanical device controls movement and downward force of the polymeric section independent of the abrasive section.  
     
     
         4 . The conditioning tool of  claim 1  wherein the base includes openings for transferring fluids to the polishing pad.  
     
     
         5 . A conditioning tool useful for treating the polishing surface of a polishing pad, comprising: 
 a base for supporting conditioning materials; the base having an abrasive section for cutting a polishing surface of a polishing pad; and a polymeric section for treating the polishing surface of the polishing pad, the polymeric section being capable of movement and downward force independent of the abrasive section and being operable in a first position with only the polymeric section in contact with the polishing surface of the polishing pad and operable in a second position with the abrasive section in contact with the polishing surface of the polishing pad.    
     
     
         6 . A method of treating the surface of a polishing pad with a conditioning tool comprising the steps of: 
 treating the polishing pad with a polymeric section of the conditioning tool to treat a polishing surface of the polishing pad;    manipulating the conditioning tool to engage an abrasive section of the conditioning tool; and    conditioning the polishing pad with the abrasive section of the conditioning tool to provide the polishing surface of the polishing pad with a conditioned surface.    
     
     
         7 . The method of  claim 6  including the additional step of treating the polishing pad with the polymeric section for more than one polishing cycle before conditioning the polishing surface with the abrasive section.  
     
     
         8 . The method of  claim 6  wherein the treating and the conditioning occur as a simultaneous operation.  
     
     
         9 . The method of  claim 6  wherein the treating the polishing pad with the polymeric section cleans the polishing surface of the polishing pad with brushes.  
     
     
         10 . The method of  claim 6  wherein the treating the polishing pad with the polymeric section conditions the polishing surface of the polishing pad with a polymeric pad.