Inventor · disambiguated record

Carey Phelps

Also filed as: PHELPS CAREY

1 granted patent·1 citations·filing 2020–2020

15Inventor score

Technology areasG03F

Files withKLA CORP1

Top patents by PatentIndex Score

1 record

0174US12100574B2Target and algorithm to measure overlay by modeling back scattering electrons on overlapping structuresKLA CORP·Filed 2020·Granted Sep 24, 2024·1 cites·9 claims

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Carey Phelps — Patent Inventor | PatentIndex