Inventor · disambiguated record
Mitsuru Hiroshima
Also filed as: HIROSHIMA MITSURU
18 granted patents·6 pending applications·35 citations·filing 2004–2017
89Inventor score
Top patents by PatentIndex Score
24 records- 0188US8673166B2Plasma processing apparatus and plasma processing methodOKITA SHOGO·Filed 2009·Granted Mar 18, 2014·17 cites·16 claims
- 0276US8906249B2Plasma processing apparatus and plasma processing methodHIROSHIMA MITSURU·Filed 2008·Granted Dec 9, 2014·7 cites·3 claims
- 0375US9653334B2Plasma processing apparatus and methodPANASONIC IP MAN CO LTD·Filed 2015·Granted May 16, 2017·2 cites·12 claims
- 0475US9431263B2Plasma processing method and apparatusPANASONIC IP MAN CO LTD·Filed 2015·Granted Aug 30, 2016·2 cites·8 claims
- 0574US9583355B2Plasma processing apparatus and plasma processing methodPANASONIC CORP·Filed 2014·Granted Feb 28, 2017·3 cites·2 claims
- 0670US10497622B2Element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2017·Granted Dec 3, 2019·1 cites·8 claims
- 0766US9922899B2Method of manufacturing element chip and element chipPANASONIC IP MAN CO LTD·Filed 2017·Granted Mar 20, 2018·1 cites·13 claims
- 0866US9911677B2Element chip and method for manufacturing the samePANASONIC IP MAN CO LTD·Filed 2017·Granted Mar 6, 2018·1 cites·5 claims
- 0966US9779986B2Plasma treatment method and method of manufacturing electronic componentPANASONIC IP MAN CO LTD·Filed 2016·Granted Oct 3, 2017·1 cites·16 claims
- 1047US8563332B2Wafer reclamation method and wafer reclamation apparatusOKITA SHOGO·Filed 2008·Granted Oct 22, 2013·0 cites·9 claims
- 1144US9905452B2Method of forming mask pattern, method of processing substrate, and method of fabricating element chipsPANASONIC IP MAN CO LTD·Filed 2016·Granted Feb 27, 2018·0 cites·10 claims
- 1242US2014332497A1Plasma processing apparatus and plasma processing methodPANASONIC CORP·Filed 2014·Application pending·0 cites
- 1341US2009218045A1Plasma processing apparatusHIROSHIMA MITSURU·Filed 2006·Application pending·0 cites
- 1439US10236266B2Element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2017·Granted Mar 19, 2019·0 cites·6 claims
- 1539US10049933B2Element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2017·Granted Aug 14, 2018·0 cites·8 claims
- 1637US11398372B2Plasma processing apparatus and plasma processing methodPANASONIC IP MAN CO LTD·Filed 2015·Granted Jul 26, 2022·0 cites·12 claims
- 1737US10475704B2Method of manufacturing element chip and element chipPANASONIC IP MAN CO LTD·Filed 2017·Granted Nov 12, 2019·0 cites·12 claims
- 1836US10177063B2Element chip and method for manufacturing the samePANASONIC IP MAN CO LTD·Filed 2017·Granted Jan 8, 2019·0 cites·6 claims
- 1936US9941167B2Method for manufacturing element chipPANASONIC IP MAN CO LTD·Filed 2017·Granted Apr 10, 2018·0 cites·6 claims
- 2036US9698073B2Method of manufacturing element chip and element chipPANASONIC IP MAN CO LTD·Filed 2016·Granted Jul 4, 2017·0 cites·3 claims
- 2136US2017263501A1Element chip and method for manufacturing the samePANASONIC IP MAN CO LTD·Filed 2017·Application pending·0 cites
- 2235US2017263525A1Element chip and method for manufacturing the samePANASONIC IP MAN CO LTD·Filed 2017·Application pending·0 cites
- 2333US2007131652A1Plasma etching methodOKUNE MITSUHIRO·Filed 2004·Application pending·0 cites
- 2432US2008138993A1Plasma Processing ApparatusHIROSHIMA MITSURU·Filed 2005·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →