Inventor · disambiguated record
Lana Hiului Chan
Also filed as: CHAN LANA · CHAN LANA HIULUI
12 granted patents·1 pending application·925 citations·filing 2003–2011
95Inventor score
Top patents by PatentIndex Score
13 records- 0198US7955972B2Methods for growing low-resistivity tungsten for high aspect ratio and small featuresNOVELLUS SYSTEMS INC·Filed 2008·Granted Jun 7, 2011·87 cites·22 claims
- 0298US7655567B1Methods for improving uniformity and resistivity of thin tungsten filmsNOVELLUS SYSTEMS INC·Filed 2007·Granted Feb 2, 2010·91 cites·14 claims
- 0398US7589017B2Methods for growing low-resistivity tungsten filmNOVELLUS SYSTEMS INC·Filed 2005·Granted Sep 15, 2009·103 cites·21 claims
- 0497US8409985B2Methods for growing low-resistivity tungsten for high aspect ratio and small featuresCHAN LANA HIULUI·Filed 2011·Granted Apr 2, 2013·59 cites·21 claims
- 0597US8048805B2Methods for growing low-resistivity tungsten filmNOVELLUS SYSTEMS INC·Filed 2009·Granted Nov 1, 2011·47 cites·18 claims
- 0697US7772114B2Method for improving uniformity and adhesion of low resistivity tungsten filmNOVELLUS SYSTEMS INC·Filed 2007·Granted Aug 10, 2010·89 cites·15 claims
- 0797US7141494B2Method for reducing tungsten film roughness and improving step coverageNOVELLUS SYSTEMS INC·Filed 2003·Granted Nov 28, 2006·147 cites·32 claims
- 0896US8409987B2Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristicsCHANDRASHEKAR ANAND·Filed 2011·Granted Apr 2, 2013·34 cites·19 claims
- 0996US8101521B1Methods for improving uniformity and resistivity of thin tungsten filmsGAO JUWEN·Filed 2009·Granted Jan 24, 2012·61 cites·20 claims
- 1096US8058170B2Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristicsCHANDRASHEKAR ANAND·Filed 2009·Granted Nov 15, 2011·83 cites·21 claims
- 1195US8329576B2Method for improving uniformity and adhesion of low resistivity tungsten filmCHAN LANA HIULUI·Filed 2010·Granted Dec 11, 2012·33 cites·21 claims
- 1295US7262125B2Method of forming low-resistivity tungsten interconnectsNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 28, 2007·91 cites·32 claims
- 1337US2012199887A1Methods of controlling tungsten film propertiesCHAN LANA·Filed 2011·Application pending·0 cites
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