Inventor · disambiguated record
Alan F. Becknell
Also filed as: BECKNELL ALAN F · BECKNELL ALAN FREDERICK
7 granted patents·135 citations·filing 1992–2006
87Inventor score
Top patents by PatentIndex Score
7 records- 0186US6524936B2Process for removal of photoresist after post ion implantationAXCELIS TECH INC·Filed 2000·Granted Feb 25, 2003·37 cites·43 claims
- 0283US7449416B2Apparatus and plasma ashing process for increasing photoresist removal rateAXCELIS TECH INC·Filed 2005·Granted Nov 11, 2008·12 cites·22 claims
- 0383US7381651B2Processes for monitoring the levels of oxygen and/or nitrogen species in a substantially oxygen and nitrogen-free plasma ashing processAXCELIS TECH INC·Filed 2006·Granted Jun 3, 2008·10 cites·19 claims
- 0474US8580076B2Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewithBECKNELL ALAN FREDERICK·Filed 2003·Granted Nov 12, 2013·15 cites·37 claims
- 0559US5981147AStable, ionomeric photoresist emulsion and process of preparation and use thereofMACDERMID INC·Filed 1997·Granted Nov 9, 1999·25 cites·23 claims
- 0659US5508141AAutodeposition emulsion and methods of using thereof to selectively protect metallic surfacesGRACE W R & CO·Filed 1994·Granted Apr 16, 1996·18 cites·10 claims
- 0752US5232815AAutodeposition emulsion and methods of using thereof to selectively protect metallic surfacesGRACE W R & CO·Filed 1992·Granted Aug 3, 1993·18 cites·47 claims
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