Inventor · disambiguated record
Michael Fritze
Also filed as: FRITZE MICHAEL
6 granted patents·2 pending applications·229 citations·filing 2001–2005
85Inventor score
Top patents by PatentIndex Score
8 records- 0196US6818389B2Method of design and fabrication of integrated circuits using regular arrays and gratingsMASSACHUSETTS INST TECHNOLOGY·Filed 2001·Granted Nov 16, 2004·145 cites·157 claims
- 0291US6884551B2Method and system of lithography using masks having gray-tone featuresMASSACHUSETTS INST TECHNOLOGY·Filed 2002·Granted Apr 26, 2005·40 cites·108 claims
- 0387US7651821B2Method and system of lithography using masks having gray-tone featuresMASSACHUSETTS INST TECHNOLOGY·Filed 2005·Granted Jan 26, 2010·10 cites·29 claims
- 0487US6934007B2Method for photolithography using multiple illuminations and a single fine feature maskMASSACHUSETTS INST TECHNOLOGY·Filed 2003·Granted Aug 23, 2005·26 cites·63 claims
- 0575US7583360B2Method for photolithography using multiple illuminations and a single fine feature maskMASSACHUSETTS INST TECHNOLOGY·Filed 2005·Granted Sep 1, 2009·4 cites·37 claims
- 0658US7306881B2Method and system of lithography using masks having gray-tone featuresMASSACHUSETTS INST TECHNOLOGY·Filed 2004·Granted Dec 11, 2007·4 cites·29 claims
- 0737US2004114869A1Mode converter including tapered waveguide for optically coupling photonic devicesFiled 2003·Application pending·0 cites
- 0836US2002191916A1Vertical waveguide tapers for optical coupling between optical fibers and thin silicon waveguidesCONFLUENT PHOTONICS CORP·Filed 2002·Application pending·0 cites
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