Inventor · disambiguated record
Mitsunori Numata
Also filed as: NUMATA MITSUNORI
7 granted patents·5 citations·filing 2013–2023
73Inventor score
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0173US9594240B2Lighting apparatus, and optical inspection apparatus and optical microscope using the lighting apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Mar 14, 2017·3 cites·19 claims
- 0272US12228499B2Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Feb 18, 2025·0 cites·19 claims
- 0368US12439607B2Inspection deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Oct 7, 2025·0 cites·20 claims
- 0468US9453800B2Apparatus and method of inspecting a defect of an objectSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Sep 27, 2016·1 cites·16 claims
- 0566US11604136B2Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 14, 2023·0 cites·14 claims
- 0666US10429315B2Imaging apparatus and imaging methodSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Oct 1, 2019·1 cites·8 claims
- 0759US11761906B2Optical deviceSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 19, 2023·0 cites·16 claims
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