Inventor · disambiguated record
Eason Yu-Shen Su
Also filed as: SU EASON YU-SHEN
3 granted patents·9 citations·filing 2011–2011
59Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0176US9524874B2Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon filmsVENKATARAMAN SHYAM SUNDAR·Filed 2011·Granted Dec 20, 2016·6 cites·17 claims
- 0271US9487675B2Chemical mechanical polishing composition comprising polyvinyl phosphonic acid and its derivativesRAMAN VIJAY IMMANUEL·Filed 2011·Granted Nov 8, 2016·3 cites·11 claims
- 0336US9157012B2Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of borophosphosilicate glass (BPSG) material in the presence of a CMP composition comprising anionic phosphate or phosphonateVENKATARAMAN SHYAM SUNDAR·Filed 2011·Granted Oct 13, 2015·0 cites·17 claims
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