Inventor · disambiguated record
Georgios A. Vakas
Also filed as: VAKAS GEORGIOS A
3 granted patents·14 citations·filing 2006–2010
65Inventor score
Top patents by PatentIndex Score
3 records- 0174US7305320B2Metrology tool recipe validator using best known methodsIBM·Filed 2006·Granted Dec 4, 2007·8 cites·20 claims
- 0262US7716009B2Metrology tool recipe validator using best known methodsIBM·Filed 2007·Granted May 11, 2010·3 cites·12 claims
- 0361US8855401B2Methods and systems involving measuring complex dimensions of silicon devicesARCHIE CHARLES N·Filed 2010·Granted Oct 7, 2014·3 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →