Inventor · disambiguated record

Tsunayuki Kimura

Also filed as: KIMURA TSUNAYUKI

1 granted patent·1 citations·filing 2005–2005

15Inventor score

Technology areasH10P

Files withASM JAPAN1

Top patents by PatentIndex Score

1 record

0154US7560144B2Method of stabilizing film quality of low-dielectric constant filmASM JAPAN·Filed 2005·Granted Jul 14, 2009·1 cites·18 claims

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