Inventor · disambiguated record
Yasutaka Hama
Also filed as: HAMA YASUTAKA
7 granted patents·4 pending applications·0 citations·filing 2015–2024
68Inventor score
Top patents by PatentIndex Score
11 records- 0169US2024063000A1Method of cleaning plasma processing apparatus and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0265US11887824B2Method of cleaning plasma processing apparatus and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jan 30, 2024·0 cites·19 claims
- 0361US11881410B2Substrate processing apparatus and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jan 23, 2024·0 cites·14 claims
- 0458US2024222095A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0556US11201063B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Dec 14, 2021·0 cites·18 claims
- 0647US11705309B2Substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Jul 18, 2023·0 cites·12 claims
- 0746US10998223B2Method for processing target objectTOKYO ELECTRON LTD·Filed 2018·Granted May 4, 2021·0 cites·11 claims
- 0846US2021233793A1Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0943US10297496B2Method for processing target objectionTOKYO ELECTRON LTD·Filed 2018·Granted May 21, 2019·0 cites·15 claims
- 1039US10950458B2Etching methodTOKYO ELECTRON LTD·Filed 2019·Granted Mar 16, 2021·0 cites·9 claims
- 1135US2017296690A1Pressurized fluid sterilizing apparatusTOKUYAMA CORP·Filed 2015·Application pending·0 cites
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