Inventor · disambiguated record
Hendrikus Herman Marie Cox
Also filed as: COX HENDRIKUS H M · COX HENDRIKUS HERMAN MARIE
12 granted patents·1 pending application·293 citations·filing 1991–2020
90Inventor score
Top patents by PatentIndex Score
13 records- 0195US6788386B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2002·Granted Sep 7, 2004·75 cites·16 claims
- 0294US5172160AOptical lithographic device having a machine frame with force compensationPHILIPS CORP·Filed 1991·Granted Dec 15, 1992·124 cites·10 claims
- 0389US10747127B2Lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 18, 2020·5 cites·26 claims
- 0487US5243491AElectromagnetic support with current-independent characteristicsPHILIPS CORP·Filed 1991·Granted Sep 7, 1993·53 cites·12 claims
- 0558US5227948AElectromagnetic support with position-independent characteristicsPHILIPS CORP·Filed 1991·Granted Jul 13, 1993·19 cites·15 claims
- 0656US5264982AElectromagnetic support with unilateral control currentsPHILIPS CORP·Filed 1991·Granted Nov 23, 1993·17 cites·4 claims
- 0753US11774865B2Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 3, 2023·0 cites·20 claims
- 0852US10394140B2Lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 27, 2019·0 cites·16 claims
- 0946US10962890B2Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Mar 30, 2021·0 cites·15 claims
- 1046US10955759B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Mar 23, 2021·0 cites·23 claims
- 1140US2011179431A1Linear motor for laser beam recorderSINGULUS MASTERING B V·Filed 2007·Application pending·0 cites
- 1239US10114299B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 30, 2018·0 cites·19 claims
- 1336US10620552B2Stage system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 14, 2020·0 cites·20 claims
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