Inventor · disambiguated record
Risa Yamakoshi
Also filed as: YAMAKOSHI Risa
7 granted patents·1 pending application·16 citations·filing 2016–2018
78Inventor score
Technology areasH10P
Files withHITACHI INT ELECTRIC INC8
Top patents by PatentIndex Score
8 records- 0190US10081868B2Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2016·Granted Sep 25, 2018·6 cites·19 claims
- 0284US10513775B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2017·Granted Dec 24, 2019·4 cites·14 claims
- 0378US10607833B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2016·Granted Mar 31, 2020·2 cites·15 claims
- 0475US11041240B2Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumHITACHI INT ELECTRIC INC·Filed 2018·Granted Jun 22, 2021·2 cites·14 claims
- 0569US9905413B2Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2017·Granted Feb 27, 2018·1 cites·13 claims
- 0665US9934960B2Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted Apr 3, 2018·1 cites·18 claims
- 0753US2018363137A1Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2018·Application pending·0 cites
- 0842US11450524B2Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumHITACHI INT ELECTRIC INC·Filed 2018·Granted Sep 20, 2022·0 cites·7 claims
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