Inventor · disambiguated record
Gaurav Keswani
Also filed as: KESWANI GAURAV
15 granted patents·16 pending applications·241 citations·filing 2006–2022
93Inventor score
Top patents by PatentIndex Score
31 records- 0197US8934080B2Apparatus and methods for recovering fluid in immersion lithographyPOON ALEX KA TIM·Filed 2012·Granted Jan 13, 2015·33 cites·21 claims
- 0297US8743343B2Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machineNIKON CORP·Filed 2013·Granted Jun 3, 2014·31 cites·34 claims
- 0396US8289497B2Apparatus and methods for recovering fluid in immersion lithographyPOON ALEX KA TIM·Filed 2009·Granted Oct 16, 2012·35 cites·36 claims
- 0495US8610873B2Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substratePOON ALEX KA TIM·Filed 2009·Granted Dec 17, 2013·26 cites·34 claims
- 0595US8237911B2Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machinePOON ALEX·Filed 2007·Granted Aug 7, 2012·34 cites·34 claims
- 0694US8400610B2Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machinePOON ALEX·Filed 2012·Granted Mar 19, 2013·32 cites·16 claims
- 0794US7576833B2Gas curtain type immersion lithography tool using porous material for fluid removalNIKON CORP·Filed 2007·Granted Aug 18, 2009·21 cites·37 claims
- 0892US7532309B2Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluidNIKON CORP·Filed 2006·Granted May 12, 2009·15 cites·22 claims
- 0979US9176394B2Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrateNIKON CORP·Filed 2013·Granted Nov 3, 2015·3 cites·19 claims
- 1079US7929109B2Apparatus and method for recovering liquid droplets in immersion lithographyNIKON CORP·Filed 2006·Granted Apr 19, 2011·5 cites·32 claims
- 1179US7751026B2Apparatus and method for recovering fluid for immersion lithographyNIKON CORP·Filed 2006·Granted Jul 6, 2010·4 cites·44 claims
- 1272US8634055B2Apparatus and method to control vacuum at porous material using multiple porous materialsPOON ALEX KA TIM·Filed 2010·Granted Jan 21, 2014·2 cites·47 claims
- 1362US9217933B2Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machineNIKON CORP·Filed 2014·Granted Dec 22, 2015·0 cites·96 claims
- 1453US8780323B2Apparatus and method for recovering liquid droplets in immersion lithographyPOON ALEX KA TIM·Filed 2011·Granted Jul 15, 2014·0 cites·23 claims
- 1548US2010231876A1Apparatus and method for recovering fluid for immersion lithographyNIKON CORP·Filed 2010·Application pending·0 cites
- 1646US2022057017A1Expandable barrier actuated valveNIKON CORP·Filed 2021·Application pending·0 cites
- 1746US2008225248A1Apparatus, systems and methods for removing liquid from workpiece during workpiece processingNIKON CORP·Filed 2008·Application pending·0 cites
- 1846US2008212050A1Apparatus and methods for removing immersion liquid from substrates using temperature gradientNIKON CORP·Filed 2008·Application pending·0 cites
- 1946US2008231823A1Apparatus and methods for reducing the escape of immersion liquid from immersion lithography apparatusNIKON CORP·Filed 2008·Application pending·0 cites
- 2046US2008198348A1Apparatus and methods for minimizing force variation from immersion liquid in lithography systemsNIKON CORP·Filed 2008·Application pending·0 cites
- 2145US2013069449A1Modular coil arrays for planar and linear motorsNIKON CORP·Filed 2012·Application pending·0 cites
- 2245US2008100812A1Immersion lithography system and method having a wafer chuck made of a porous materialNIKON CORP·Filed 2007·Application pending·0 cites
- 2345US2008043211A1Apparatus and methods for recovering fluid in immersion lithographyNIKON CORP·Filed 2007·Application pending·0 cites
- 2444US2007126999A1Apparatus and method for containing immersion liquid in immersion lithographyNIKON CORP·Filed 2006·Application pending·0 cites
- 2543US2010156198A1Shield layer plus refrigerated backside cooling for planar motorsCOOPER ALEXANDER·Filed 2009·Application pending·0 cites
- 2642US2008073563A1Exposure apparatus that includes a phase change circulation system for moversNIKON CORP·Filed 2006·Application pending·0 cites
- 2741US11092170B2Dual valve fluid actuator assemblyNIKON CORP·Filed 2018·Granted Aug 17, 2021·0 cites·21 claims
- 2841US2024202184A1Methods and systems for managing list data structures in event-driven systemsSHOPIFY INC·Filed 2022·Application pending·0 cites
- 2939US2012062866A1Microchannel-cooled coils of electromagnetic actuators exhibiting reduced eddy-current dragBINNARD MICHAEL B·Filed 2011·Application pending·0 cites
- 3037US2010220301A1Apparatus and method to control liquid stagnation in immersion liquid recoveryNIKON CORP·Filed 2010·Application pending·0 cites
- 3135US2010271159A1Electromagnetic Coil Design for Improved Thermal PerformanceNIKON CORP·Filed 2010·Application pending·0 cites
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