Inventor · disambiguated record
Toyomi Uenoyama
Also filed as: UENOYAMA TOYOMI
7 granted patents·170 citations·filing 2000–2013
87Inventor score
Top patents by PatentIndex Score
7 records- 0194US6422264B2Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatusFUJIKIN KK·Filed 2000·Granted Jul 23, 2002·64 cites·5 claims
- 0291US6820632B2Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatusFUJIKIN KK·Filed 2002·Granted Nov 23, 2004·39 cites·3 claims
- 0376US6848470B2Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatusFUJIKIN KK·Filed 2004·Granted Feb 1, 2005·15 cites·7 claims
- 0475US9098082B2Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controllerFUJIKIN KK·Filed 2013·Granted Aug 4, 2015·5 cites·7 claims
- 0572US8496022B2Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controllerSUGIYAMA KAZUHIKO·Filed 2004·Granted Jul 30, 2013·15 cites·7 claims
- 0671US7059363B2Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control systemTOKYO ELECTRON LTD·Filed 2003·Granted Jun 13, 2006·23 cites·10 claims
- 0758US7669455B2Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control deviceFUJIKIN KK·Filed 2004·Granted Mar 2, 2010·9 cites·17 claims
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