Inventor · disambiguated record
Michael Roger Czerniak
Also filed as: CZERNIAK MICHAEL R · CZERNIAK MICHAEL ROGER
7 granted patents·3 pending applications·11 citations·filing 2003–2018
76Inventor score
Files withEDWARDS LTD4SMITH JAMES ROBERT2CZERNIAK MICHAEL R1CZERNIAK MICHAEL ROGER1PHILIPPE LAURENT MARC1
Top patents by PatentIndex Score
10 records- 0167US9631810B2Method of treating an exhaust gas streamCZERNIAK MICHAEL ROGER·Filed 2010·Granted Apr 25, 2017·5 cites·9 claims
- 0256US7445023B2Apparatus for conveying gases to and from a chamberEDWARDS LTD·Filed 2004·Granted Nov 4, 2008·4 cites·6 claims
- 0350US8793007B2Vacuum pumping systemsPHILIPPE LAURENT MARC·Filed 2009·Granted Jul 29, 2014·2 cites·29 claims
- 0448US9081379B2Evacuation system alerts based on process tool systems bus monitoringSMITH JAMES ROBERT·Filed 2012·Granted Jul 14, 2015·0 cites·4 claims
- 0546US11839903B2Vacuum pumping systemEDWARDS LTD·Filed 2018·Granted Dec 12, 2023·0 cites·24 claims
- 0643US2009269231A1Method of Pumping GasEDWARDS LTD·Filed 2006·Application pending·0 cites
- 0741US8224474B2Method of controlling operation of a processing systemSMITH JAMES ROBERT·Filed 2005·Granted Jul 17, 2012·0 cites·24 claims
- 0841US2008017108A1Gas combustion apparatusCZERNIAK MICHAEL R·Filed 2007·Application pending·0 cites
- 0939US2005123463A1Treatment of exhaust gasesFiled 2003·Application pending·0 cites
- 1037US10625205B2Apparatus for evacuating a corrosive effluent gas stream from a processing chamberEDWARDS LTD·Filed 2016·Granted Apr 21, 2020·0 cites·34 claims
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