Inventor · disambiguated record
Ulrich Stroessner
Also filed as: STROESSNER ULRICH
7 granted patents·2 pending applications·31 citations·filing 2004–2009
81Inventor score
Top patents by PatentIndex Score
9 records- 0177US8736849B2Method and apparatus for measuring structures on photolithography masksSTROESSNER ULRICH·Filed 2009·Granted May 27, 2014·5 cites·33 claims
- 0272US8718354B2Method for analyzing masks for photolithographySTROESSNER ULRICH·Filed 2009·Granted May 6, 2014·4 cites·20 claims
- 0361US7535640B2Imaging system for emulation of a high aperture scanning systemZEISS CARL SMS GMBH·Filed 2004·Granted May 19, 2009·7 cites·8 claims
- 0460US7961297B2Method for determining intensity distribution in the image plane of a projection exposure arrangementZEISS CARL SMS GMBH·Filed 2006·Granted Jun 14, 2011·1 cites·25 claims
- 0558US7286284B2Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspectionZEISS CARL SMS GMBH·Filed 2004·Granted Oct 23, 2007·13 cites·34 claims
- 0657US7626689B2Method and device for analysing the imaging behavior of an optical imaging elementZEISS CARL SMS GMBH·Filed 2006·Granted Dec 1, 2009·1 cites·30 claims
- 0745US2010153059A1Apparatus and method for measuring the positions of marks on a maskKLOSE GERD·Filed 2008·Application pending·0 cites
- 0844US9116447B2Microscope for reticle inspection with variable illumination settingsSTROESSNER ULRICH·Filed 2009·Granted Aug 25, 2015·0 cites·22 claims
- 0939US2006028706A1Polarizer device for generating a defined spatial distribution of polarization statesZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
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