Inventor · disambiguated record
Sunny Wu
Also filed as: WU SUNNY
24 granted patents·2 pending applications·264 citations·filing 1989–2015
95Inventor score
Files withTAIWAN SEMICONDUCTOR MFG10WU SUNNY4TSAI PO-FENG3TAIWAN SEMICONDUCTOR MFG CO LTD2TSEN ANDY2
Top patents by PatentIndex Score
26 records- 0193US7144297B2Method and apparatus to enable accurate wafer predictionTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Dec 5, 2006·40 cites·16 claims
- 0292US8295965B2Semiconductor processing dispatch controlWU SUNNY·Filed 2010·Granted Oct 23, 2012·15 cites·7 claims
- 0392US8108060B2System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architectureTSEN ANDY·Filed 2009·Granted Jan 31, 2012·25 cites·19 claims
- 0492US5016849ASwivel mechanism for a monitor of a laptop computerDATATECH ENTERPRISES CO LTD·Filed 1989·Granted May 21, 1991·114 cites·2 claims
- 0584US8606387B2Adaptive and automatic determination of system parametersTSAI PO-FENG·Filed 2011·Granted Dec 10, 2013·6 cites·20 claims
- 0683US9158301B2Semiconductor processing dispatch controlTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Oct 13, 2015·4 cites·20 claims
- 0782US8205173B2Physical failure analysis guiding methodsWU SUNNY·Filed 2010·Granted Jun 19, 2012·7 cites·20 claims
- 0881US8041451B2Method for bin-based controlTAIWAN SEMICONDUCTOR MFG·Filed 2009·Granted Oct 18, 2011·9 cites·21 claims
- 0980US8082055B2Method for a bin ratio forecast at new tape out stageLIN CHUN-HSIEN·Filed 2009·Granted Dec 20, 2011·7 cites·20 claims
- 1079US9519285B2Systems and associated methods for tuning processing toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 13, 2016·4 cites·20 claims
- 1174US8781614B2Semiconductor processing dispatch controlWU SUNNY·Filed 2012·Granted Jul 15, 2014·2 cites·18 claims
- 1271US8452439B2Device performance parmeter tuning method and systemWU SUNNY·Filed 2011·Granted May 28, 2013·4 cites·13 claims
- 1369US9349660B2Integrated circuit manufacturing tool condition monitoring system and methodTSAI PO-FENG·Filed 2011·Granted May 24, 2016·2 cites·20 claims
- 1466US9141097B2Adaptive and automatic determination of system parametersTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 22, 2015·1 cites·20 claims
- 1564US8219341B2System and method for implementing wafer acceptance test (“WAT”) advanced process control (“APC”) with routing modelTSEN ANDY·Filed 2009·Granted Jul 10, 2012·2 cites·14 claims
- 1664US7083495B2Advanced process control approach for Cu interconnect wiring sheet resistance controlTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Aug 1, 2006·9 cites·29 claims
- 1758US8685759B2E-chuck with automated clamped force adjustment and calibrationWANG JO FEI·Filed 2010·Granted Apr 1, 2014·1 cites·20 claims
- 1858US7851233B2E-chuck for automated clamped force adjustment and calibrationTAIWAN SEMICONDUCTOR MFG·Filed 2009·Granted Dec 14, 2010·0 cites·14 claims
- 1958US6843264B2Multi-phase pressure control valve for process chamberTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jan 18, 2005·10 cites·8 claims
- 2051US9698065B2Real-time calibration for wafer processing chamber lamp modulesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jul 4, 2017·0 cites·20 claims
- 2149US9159597B2Real-time calibration for wafer processing chamber lamp modulesCHANG CHIH-TIEN·Filed 2012·Granted Oct 13, 2015·0 cites·20 claims
- 2246US7354623B2Surface modification of a porous organic material through the use of a supercritical fluidTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Apr 8, 2008·1 cites·14 claims
- 2342US10047439B2Method and system for tool condition monitoring based on a simulated inline measurementTSAI PO FENG·Filed 2011·Granted Aug 14, 2018·0 cites·20 claims
- 2441US2006129257A1Novel method and apparatus for integrating fault detection and real-time virtual metrology in an advanced process control frameworkTAIWAN SEMICONDUCTOR MFG·Filed 2004·Application pending·0 cites
- 2538US2005031796A1Method and apparatus for controlling spatial distribution of RF power and plasma densityTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
- 2629USD328289SLaptop computerDATATECH ENTPR CO LTD·Filed 1989·Granted Jul 28, 1992·1 cites·1 claims
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