Inventor · disambiguated record
Robert T. Froebel
Also filed as: FROEBEL ROBERT T · FROEBEL ROBERT TRUMAN
5 granted patents·19 citations·filing 1999–2009
72Inventor score
Top patents by PatentIndex Score
5 records- 0155US7456966B2Alignment mark system and method to improve wafer alignment search rangeIBM·Filed 2004·Granted Nov 25, 2008·5 cites·11 claims
- 0245US8634063B2Wafer with design printed outside active region and spaced by design tolerance of reticle blindFROEBEL ROBERT T·Filed 2009·Granted Jan 21, 2014·0 cites·8 claims
- 0345US7656505B2Apparatus to easily measure reticle blind positioning with an exposure apparatusIBM·Filed 2006·Granted Feb 2, 2010·0 cites·6 claims
- 0441US6344698B2More robust alignment mark designIBM·Filed 1999·Granted Feb 5, 2002·14 cites·9 claims
- 0536US7005221B2Method and apparatus to easily measure reticle blind positioning with an exposure apparatusIBM·Filed 2002·Granted Feb 28, 2006·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →