Inventor · disambiguated record
Jyothi Singh
Also filed as: SINGH JYOTHI
14 granted patents·568 citations·filing 1987–1999
95Inventor score
Files withIBM14
Top patents by PatentIndex Score
14 records- 0194US5367139AMethods and apparatus for contamination control in plasma processingIBM·Filed 1989·Granted Nov 22, 1994·60 cites·32 claims
- 0292US5308414AMethod and apparatus for optical emission end point detection in plasma etching processesIBM·Filed 1992·Granted May 3, 1994·79 cites·16 claims
- 0392US4846920APlasma amplified photoelectron process endpoint detection apparatusIBM·Filed 1987·Granted Jul 11, 1989·53 cites·35 claims
- 0485US5683538AControl of etch selectivityIBM·Filed 1994·Granted Nov 4, 1997·85 cites·8 claims
- 0583US5738440ACombined emissivity and radiance measurement for the determination of the temperature of a radiant objectIBM·Filed 1994·Granted Apr 14, 1998·52 cites·6 claims
- 0681US5770097AControl of etch selectivityIBM·Filed 1997·Granted Jun 23, 1998·56 cites·5 claims
- 0781US5387777AMethods and apparatus for contamination control in plasma processingIBM·Filed 1992·Granted Feb 7, 1995·42 cites·26 claims
- 0876US5993059ACombined emissivity and radiance measurement for determination of temperature of radiant objectIBM·Filed 1998·Granted Nov 30, 1999·43 cites·14 claims
- 0975US5382911AReaction chamber interelectrode gap monitoring by capacitance measurementIBM·Filed 1993·Granted Jan 17, 1995·32 cites·5 claims
- 1070US5953115AMethod and apparatus for imaging surface topography of a waferIBM·Filed 1997·Granted Sep 14, 1999·35 cites·18 claims
- 1151US5534066AFluid delivery apparatus having an infrared feedline sensorIBM·Filed 1993·Granted Jul 9, 1996·14 cites·15 claims
- 1249US5492718AFluid delivery apparatus and method having an infrared feedline sensorIBM·Filed 1994·Granted Feb 20, 1996·11 cites·16 claims
- 1336US6048745AMethod for mapping scratches in an oxide filmIBM·Filed 1997·Granted Apr 11, 2000·4 cites·14 claims
- 1433US6291833B2Apparatus for mapping scratches in an oxide filmIBM·Filed 1999·Granted Sep 18, 2001·2 cites·4 claims
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